Optical properties of molybdenum in the ultraviolet and extreme ultraviolet by reflection electron energy loss spectroscopy

被引：9

作者：

Pauly, N. ^{[1
]}

Yubero, F. ^{[2
]}

Tougaard, S. ^{[3
]}

机构：

[1] Univ Libre Bruxelles, Serv Metrol Nucl, CP 165-84,50 Ave FD Roosevelt, B-1050 Brussels, Belgium

[2] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, Ave Amer Vespucio 49, E-41092 Seville, Spain

[3] Univ Southern Denmark, Dept Phys Chem & Pharm, DK-5230 Odense M, Denmark

来源：

APPLIED OPTICS | 2020年 / 59卷 / 14期

关键词：

LOSS SPECTRA; CROSS-SECTIONS; THIN-FILMS; CONSTANTS; SCATTERING; MO; TRANSMISSION; TA;

D O I：

10.1364/AO.391014

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Optical properties of polycrystalline molybdenum are determined from ultraviolet up to extreme ultraviolet by reflection electron energy loss spectroscopy (REELS). Calculations are performed within the dielectric response theory by means of the quantitative analysis of electron energy losses at surfaces QUEELS-epsilon (k, omega)-REELS software [Surf. Interface Anal. 36, 824 (2004)] that allows the simulation of inelastic scattering cross sections, using a parametric energy loss function describing the optical response of the material. From this energy loss function, the real and imaginary parts of the dielectric function, the refractive index, and the extinction coefficient are deduced and compared with previously published results. (C) 2020 Optical Society of America

引用

页码：4527 / 4532

页数：6

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