X-ray electron probe microanalysis in the vicinity of M absorption edges

Nine correction methods with five methods of calculating absorption coefficients are tested for the cases when the analytical line is located in the vicinity of the M adsorption edges of elements with atomic numbers from 76-83. Calculations were performed using the CARAT program and experiments, on the Camebacs Micro microanalyzer. It was found that none of the correction methods can maintain the appropriate accuracy within all absorption ranges. It was proposed to change the mu/rho ratio in the corresponding inner intervals, which will ensure an accuracy of the analysis at a level of 1 rel %.