The experiments are performed to determine conditions of carbon nanotubes (CNTs) CVD-synthesis on a surface of substrates of pure titanium or passivated with TiN protective layer. The industrial vacuum facility is used. As revealed, the CNTs are not synthesized on catalytic Ni-centres formed on the pure titanium surface after deposition of a thin nickel layer and its vacuum annealing. Under the optimal technological conditions, branched carbon nanostructures in the form of chaotically oriented multiwall CNTs are synthesized on catalytic centres formed on passivating TiN coatings.
机构:
Nagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Imaizumi, Yoshiaki
Arakawa, Yoichiro
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Nagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Arakawa, Yoichiro
Fukuda, Toshio
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Nagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Micro Nano Syst, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Fukuda, Toshio
2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE,
2006,
: 172
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