Photoacoustic spectroscopy analysis of thin semiconductor samples

被引:5
|
作者
Bychto, L. [1 ]
Malinski, M. [1 ]
机构
[1] Koszalin Univ Technol, Fac Elect & Comp Sci, 2 Sniadeckich St, PL-75453 Koszalin, Poland
关键词
Photothermal spectroscopy; Photoacoustics; Optical absorption coefficient spectra; Thin semiconductor films; OPTICAL-PROPERTIES; BAND-GAP; ANNEALING PROCESSES; FILMS; SPECTRA; GROWTH; CDTE;
D O I
10.1016/j.opelre.2018.06.005
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper is an analysis of determination possibility of the optical absorption coefficient spectra of thin semiconductor layers from their normalized photoacoustic amplitude spectra. Influence of multiple reflections of light in thin layers on their photoacoustic and optical absorption coefficient spectra is presented and discussed in detail. Practical formulae for the optical absorption coefficient spectrum as a function of the normalized photoacoustic amplitude spectrum are derived and presented. Next, they were applied for computations of the optical absorption coefficient spectra of thin In2S3 thin layers deposited on a glass substrate. This method was experimentally verified with the optical transmission method. (C) 2018 Association of Polish Electrical Engineers (SEP). Published by Elsevier B.V. All rights reserved.
引用
收藏
页码:217 / 222
页数:6
相关论文
共 50 条
  • [41] Photoacoustic spectroscopy analysis of silicon crystals
    Benamrani, H.
    Satour, F. Z.
    Zegadi, A.
    Zouaoui, A.
    JOURNAL OF LUMINESCENCE, 2012, 132 (02) : 305 - 312
  • [42] TRACE MERCURY ANALYSIS BY PHOTOACOUSTIC SPECTROSCOPY
    ROE, DK
    CARY, RA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1978, 175 (MAR): : 47 - 47
  • [43] Process analysis of biofilms by photoacoustic spectroscopy
    Schmid, T
    Helmbrecht, C
    Panne, U
    Haisch, C
    Niessner, R
    ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2003, 375 (08) : 1124 - 1129
  • [44] Process analysis of biofilms by photoacoustic spectroscopy
    T. Schmid
    C. Helmbrecht
    U. Panne
    C. Haisch
    R. Niessner
    Analytical and Bioanalytical Chemistry, 2003, 375 : 1124 - 1129
  • [45] Attenuated total reflection spectroscopy for infrared analysis of thin layers on a semiconductor substrate
    Rochat, N.
    Chabli, A.
    Bertin, F.
    Olivier, M.
    Vergnaud, C.
    Mur, P.
    1600, American Institute of Physics Inc. (91):
  • [46] Attenuated total reflection spectroscopy for infrared analysis of thin layers on a semiconductor substrate
    Rochat, N
    Chabli, A
    Bertin, F
    Olivier, M
    Vergnaud, C
    Mur, P
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (08) : 5029 - 5034
  • [47] Non-Traditional Spectroscopy for Analysis of Semiconductor and Photovoltaic Thin Film Materials
    Li, Fuhe
    Anderson, Scott
    FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009, 2009, 1173 : 62 - 66
  • [48] PHOTOACOUSTIC SPECTROSCOPY OF THICK POWDERED OR POROUS SAMPLES AT LOW FREQUENCY.
    Monchalin, J.-P.
    Bertrand, L.
    Rousset, G.
    Lepoutre, F.
    1600, (56):
  • [49] PHOTOACOUSTIC FOURIER-TRANSFORM INFRARED-SPECTROSCOPY OF SOLID SAMPLES
    VIDRINE, DW
    APPLIED SPECTROSCOPY, 1980, 34 (03) : 314 - 319
  • [50] SURFACE-PHOTOACOUSTIC-WAVE SPECTROSCOPY OF THIN-FILMS
    BRUECK, SRJ
    DEUTSCH, TF
    OATES, DE
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (01): : 114 - 114