An innovative gas sensor with on-chip reference using monolithic twin laser

被引：9

作者：

Zhang Yong-Gang ^{[1
]}

Tian Zhao-Bing ^{[1
]}

Zhang Xiao-Jun ^{[1
]}

Gu Yi ^{[1
]}

Li Ai-Zhen ^{[1
]}

Zhu Xiang-Rong ^{[1
]}

Zheng Yan-Lan ^{[1
]}

Liu Sheng ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2007年 / 24卷 / 10期

关键词：

D O I：

10.1088/0256-307X/24/10/035

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An innovative gas sensor with on-chip reference using a monolithic twin laser is proposed. In this sensor a monolithic twin laser generates two closer laser beams with slight different wavelengths alternatively, one photodiode is used to catch both absorption and reference signals by time division multiplexing. The detection of nitrous oxide adopting this scheme using a 2.1 mu m antimonide laser and an InGaAs photodiode has been demonstrated experimentally with detection limit below 1 ppm. Using this on chip reference scheme the fluctuations from the optical path and devices can be compensated effectively; the sensor system is simplified distinctly.

引用

页码：2839 / 2841

页数：3

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