Keyhole Reflection-Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces Using a Tabletop EUV Source

被引：0

作者：

Shanblatt, Elisabeth ^{[1
]}

Seaberg, Matthew ^{[1
]}

Zhang, Bosheng ^{[1
]}

Gardner, Dennis ^{[1
]}

Murnane, Margaret ^{[1
]}

Kapteyn, Henry ^{[1
]}

Adams, Daniel ^{[1
]}

机构：

[1] Univ Colorado, JILA, Boulder, CO 80309 USA

来源：

X-RAY LASERS 2014 | 2016年 / 169卷

关键词：

D O I：

10.1007/978-3-319-19521-6_33

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate the first reflection-mode keyhole coherent diffractive imaging (CDI) of non-isolated samples from a single diffraction pattern. A table-top high harmonic generation (HHG) beam at 30 nm wavelength, with a highly curved wave-front, is used to illuminate Ti nano-patterns on a Si substrate at a 45. angle of incidence. The 30 nm illumination beam profile is first characterized using ptychograhic CDI. Keyhole CDI (kCDI) is then used to image the nano-sample. In contrast to ptychography CDI, keyhole CDI needs only one diffraction pattern, and therefore requires no scanning of the sample. This is a significant advantage for dynamic imaging, allowing a sequence of time-delayed images of the same region to be easily acquired. Our technique opens the door for imaging dynamics in nanostructures with sub-10 nm spatial resolution and fs temporal resolution.

引用

页码：253 / 257

页数：5

共 8 条

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Adams, Daniel E.
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[7] Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography
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