Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

被引：0

作者：

Bevis, Charles S. ^{[1
]}

Karl, Robert M., Jr. ^{[1
]}

Wang, Bin ^{[1
]}

Esashi, Yuka ^{[1
]}

Tanksalvala, Michael ^{[1
]}

Porter, Christina L. ^{[1
]}

Johnsen, Peter ^{[1
]}

Adams, Daniel E. ^{[1
]}

Murnane, Margaret M. ^{[1
]}

Kapteyn, Henry C. ^{[1
]}

机构：

[1] Univ Colorado, JILA, 440 UCB, Boulder, CO 80309 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXII | 2018年 / 10585卷

关键词：

Coherent diffractive imaging; ptychography; phase retrieval; through-pellicle imaging; OPTIMIZATION;

D O I：

10.1117/12.2307861

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present preliminary through-pellicle imaging using a 30nm tabletop extreme ultraviolet (EUV) coherent diffractive imaging microscope. We show that even in a non-optimized setup, this technique enables through-pellicle imaging of a sample with no detectable impact on image fidelity or resolution.

引用

页数：4

共 17 条

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