Spontaneous Formation of AlInN Core-Shell Nanorod Arrays by Ultrahigh-Vacuum Magnetron Sputter Epitaxy

被引：16
|
作者：
Hsiao, Ching-Lien [1 ]
Palisaitis, Justinas [1 ]
Junaid, Muhammad [1 ]
Chen, Ruei-San [1 ]
Persson, Per O. A. [1 ]
Sandstrom, Per [1 ]
Holtz, Per-Olof [1 ]
Hultman, Lars [1 ]
Birch, Jens [1 ]
机构：
[1] Linkoping Univ, Dept Phys Chem & Biol IFM, SE-58183 Linkoping, Sweden
来源：
APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 11期
关键词：
GROWTH; GAN;
D O I：
10.1143/APEX.4.115002
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The spontaneous formation of AlInN core-shell nanorod arrays with variable In concentration has been realized by ultrahigh-vacuum magnetron sputter epitaxy with Ti0.21Zr0.79N or VN seed layer assistance. The nanorods exhibit hexagonal cross sections with preferential growth along the c-axis. A core-shell rod structure with a higher In concentration in the core was observed by (scanning) transmission electron microscopy in combination with low-loss electron energy loss spectroscopy and energy dispersive X-ray spectroscopy. 5 K cathodoluminescence spectroscopy of Al0.86In0.14N nanorods revealed band edge emission at similar to 5.46 eV, which was accompanied by a strong defect-related emission at similar to 3.38 eV. (C) 2011 The Japan Society of Applied Physics
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