High-frequency micro-inductor fabricated on NiCuZn ferrite substrates

被引：9
|
作者：
Tang, XL [1 ]
Zhang, HW [1 ]
Su, H [1 ]
Shi, Y [1 ]
Jiang, XD [1 ]
机构：
[1] Univ Elect Sci & Technol China, Inst Microelect & Solid State Elect, Chengdu 610054, Sichuan, Peoples R China
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 293卷 / 02期
基金：
中国国家自然科学基金;
关键词：
sandwich inductor; inductance; NiCuZn ferrite;
D O I：
10.1016/j.jmmm.2004.11.577
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have fabricated the planar micro-inductors directly on a NiCuZn ferrite substrate. Due to NiCuZn's high resistivity, no insulator is required between the coil and the magnetic film; an advantage in terms of ease fabricated and stray capacitance reduction. Sandwiched inductors show improvement of inductance from 16 to 80 nH at 1 MHz compared with the coreless inductors, and the increment of inductance is larger than the sandwiched thin film inductor. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：812 / 815
页数：4
相关论文
共 50 条
  • [1] Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor
    Yang, Lin-Lin
    Gao, Li-Yin
    Chen, Chunhuan
    Liu, Zhi-Quan
    [J]. 2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2018, : 1241 - 1245
  • [2] Electrodeposited anisotropic NiFe 45/55 thin films for high-frequency micro-inductor applications
    O'Donnell, Terence
    Wang, Ningning
    Kulkarni, Santosh
    Meere, Ronan
    Rhen, Fernando M. F.
    Roy, Saibal
    O'Mathuna, S. C.
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2010, 322 (9-12) : 1690 - 1693
  • [3] On-chip dome-shape spiral micro-inductor for high-frequency applications.
    Chomnawang, N
    Lee, JB
    [J]. SMART STRUCTURES AND MATERIALS 2002: SMART ELECTRONICS, MEMS, AND NANOTECHNOLOGY, 2002, 4700 : 50 - 57
  • [4] On-chip 3D air core micro-inductor for high-frequency applications using deformation of sacrificial polymer
    Chomnawang, N
    Lee, JB
    [J]. SMART STRUCTURES AND MATERIALS 2001: SMART ELECTRONICS AND MEMS, 2001, 4334 : 54 - 62
  • [5] RF integrated planar inductor fabricated on ferrite substrates
    Liu, B. Y.
    Zhang, H. W.
    Tang, X. L.
    Su, H.
    [J]. 2006 INTERNATIONAL CONFERENCE ON COMMUNICATIONS, CIRCUITS AND SYSTEMS PROCEEDINGS, VOLS 1-4: VOL 1: SIGNAL PROCESSING, 2006, : 2623 - +
  • [6] Research and Development of High Frequency Thin Film Magnetic Micro-Inductor in Power Supply on Chip
    Chen, Wei
    Yang, Shijun
    [J]. Diangong Jishu Xuebao/Transactions of China Electrotechnical Society, 2019, 34 (24): : 5151 - 5165
  • [7] High Mn content NiCuZn ferrite for multiplayer chip inductor application
    Li, B
    Yue, ZX
    Qi, XW
    Zhou, J
    Gui, ZL
    Li, LT
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 99 (1-3): : 252 - 254
  • [8] High-Frequency Inductor Materials
    Varga, L. K.
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2014, 43 (01) : 117 - 120
  • [9] High-Frequency Inductor Materials
    L. K. Varga
    [J]. Journal of Electronic Materials, 2014, 43 : 117 - 120
  • [10] Planar Spiral Micro-Inductor Based on Graphene/Cu Composite Film Conductive Coil Fabricated by MEMS Technology
    Lei, Chong
    Ma, Quankun
    Zhi, Shaotao
    Yan, Lili
    Zhang, Chong
    Liu, Cui
    Sun, Xuecheng
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2023, 52 (12) : 8030 - 8037
12345