Non-contact precision laser probe

被引：0

作者：

Zhang, Y ^{[1
]}

Zhang, JJ ^{[1
]}

Zhang, GY ^{[1
]}

Xu, XP ^{[1
]}

Yang, JX ^{[1
]}

Zhang, LC ^{[1
]}

机构：

[1] Changchun Univ Sci & Technol, Inst Optoelect Engn, Changchun 130022, Peoples R China

来源：

ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS | 2003年

关键词：

precision measurement; laser probe; non-contact measuring;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The paper describes the principle and structure of the non-contact precision laser in details. In order to eliminate the position signal change caused by light quantities change, so as to obtain the position signal that doesn't depend on the luminous quantities. The processing method of optoelectronic conversion weak signal and PSD drive circuit are discussed, the positional accuracy curve for lathing ringing milling workpieces is measured, the repeatedly accuracy of the probe is up to 0.0005mm. the laser probe can be used for the non-contact measurement for the thickness of soft material, for example, rubber, plastic, film and so on, and also can be used to the flexible machining center, three-coordinate measuring machine to realize 3-D non-contact dynamic measurement.

引用

页码：3636 / 3638

页数：3

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