Full-field laser vibration measurement in NDT techniques

Research of Non Destructive Testing (NDT) methodology has developed rapidly in recent years([1][2]). But it is rarely used for small objects such as Micro-electronic Mechanics System. Due to the small size of the MEMS, the traditional method of contact measurement seriously affects the parameter of the object measured. So a high accuracy non-contact measurement is required for optimization of MEMS designs and improvement of its reliability([3][4]). With recent advances in photonics, electronics, and computer technology, a Non Destructive Testing (NDT) laser time average interferometry is proposed in the paper. Laser interferometry has the advantages of non-contact, high accuracy, full-field and fast speed, so it can be used to detect cracks in MEMS. A time average measurement method of digital speckle pattern interferometry is proposed to measure the vibration mode of the MEMS in the paper. According to the sudden change of amplitude of vibration mode, a crack can be measured. With the speckle average technology, high accuracy phase-shift, continuous phase scanning technology, combined with optical amplification technology, the resolution of the amplitude reaches 1nm, and the resolution of the crack reaches 5 mu m. The measurement system being full-field, the measuring speed of the measurement system can reach 512*512 points per one minute.