Characterization on Bandedge Electronic Structure of MgO Added Bi1.5Zn1.0Nb1.5O7 Gate Dielectrics for ZnO-Thin Film Transistors

被引:2
|
作者
Cho, Nam Gyu [1 ,2 ]
Seo, Hyungtak [3 ,4 ]
Kim, Dong Hun [5 ]
Kim, Ho-Gi [2 ]
Kim, Jinwoo [6 ]
Kim, Il-Doo [1 ]
机构
[1] Korea Inst Sci & Technol, Optelect Mat Ctr, Seoul 130650, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
[3] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Chem Sci, Berkeley, CA 94720 USA
[4] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA
[5] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[6] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
关键词
OXIDE SEMICONDUCTORS; TRANSPARENT; INSULATOR;
D O I
10.1149/1.3508481
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Significantly reduced leakage current characteristics of the Bi1.5Zn1.0Nb1.5O7 (BZN) gate dielectric for producing high-performance ZnO-thin film transistors (TFTs) were achieved by an addition of MgO (30 atom %). The overall TFT parameters using MgO-BZN gate insulator against those that used pure BZN dielectric were enhanced remarkably. The diphasic MgO-BZN composite oxide structure was confirmed by an analysis of the spectroscopically detected bandedge electronic structures. The bandgap energy of MgO-BZN was identical to that of BZN at similar to 3.3 eV, but the Fermi energy level was shifted to 1.2 eV from 0.6 eV for BZN against the valence bandedge. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3508481] All rights reserved.
引用
收藏
页码:G4 / G7
页数:4
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