Benzocyclobutene (BCB) Polymer as Amphibious Buffer Layer for Graphene Field-Effect Transistor

被引:1
|
作者
Wu, Yun [1 ]
Zou, Jianjun [1 ]
Huo, Shuai [1 ]
Lu, Haiyan [1 ]
Kong, Yuecan [1 ]
Chen, Tangshen [1 ]
Wu, Wei [2 ,3 ]
Xu, Jingxia [4 ]
机构
[1] Nanjing Elect Device Inst, Sci & Technol Monolith Integrated Circuit & Modul, Nanjing 210016, Peoples R China
[2] Wuhan Univ, Sch Printing & Packaging, Lab Printable Funct Nanomat & Printed Elect, Wuhan 430072, Peoples R China
[3] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
[4] Hubei Univ Technol, Sch Elect & Elect Engn, Wuhan 430068, Peoples R China
关键词
Hydrophobic; Field-Effect Transistor; Buffer Layer; Scattering; Wet-Transfer Method; ELECTROCHEMICAL PERFORMANCE; HIGH-FREQUENCY; OXIDE; COMPOSITES; DEVICES; ANODE;
D O I
10.1166/jnn.2015.10034
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Owing to the scattering and trapping effects, the interfaces of dielectric/graphene or substrate/graphene can tailor the performance of field-effect transistor (FET). In this letter, the polymer of benzocyclobutene (BCB) was used as an amphibious buffer layer and located at between the layers of substrate and graphene and between the layers of dielectric and graphene. Interestingly, with the help of nonpolar and hydrophobic BOB buffer layer, the large-scale top-gated, chemical vapor deposited (CVD) graphene transistors was prepared on Si/SiO2 substrate, its cutoff frequency (f(T)) and the maximum cutoff frequency (f(max)) of the graphene field-effect transistor (GFET) can be reached at 12 GHz and 11 GHz, respectively.
引用
收藏
页码:5706 / 5710
页数:5
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