Convenient method of X-ray absorption spectroscopy using EPMA

Fine structures in X-ray fluorescence spectra are explained from the view point of trace analysis. Among these fine structures, the physical processes of the X-ray Raman and radiative Auger effects are explained in detail. The similarity between the radiative Auger effect and X-ray absorption fine structures (XAFS) are described. A novel method to measure the XAFS spectra using the radiative Auger effect is explained; this method has been named EXEFS. Various numerical results of EXEFS Fourier analysis are described with the change of parameters in the numerical analysis. A potential of applying EXEFS method to microbeam analysis is reviewed.