Generic modeling of non-planar dielectrics for 21/2D parasitic extraction is addressed. First, basic non-planar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling non-planar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 21/2D extraction tool.
机构:
Nagoya Univ, Inst Mat & Syst Sustainabil IMaSS, Nagoya, Aichi 4648601, Japan
NIMS, Int Ctr Mat Nanoarchitecton WPI MANA, Tsukuba, Ibaraki 3050044, JapanNagoya Univ, Inst Mat & Syst Sustainabil IMaSS, Nagoya, Aichi 4648601, Japan
Osada, Minoru
Sasaki, Takayoshi
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机构:
NIMS, Int Ctr Mat Nanoarchitecton WPI MANA, Tsukuba, Ibaraki 3050044, JapanNagoya Univ, Inst Mat & Syst Sustainabil IMaSS, Nagoya, Aichi 4648601, Japan