Generic modeling of non-planar dielectrics for 2 1/2D parasitic extraction

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作者
Kurt-Karsilayan, N
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TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Generic modeling of non-planar dielectrics for 21/2D parasitic extraction is addressed. First, basic non-planar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling non-planar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 21/2D extraction tool.
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页码:64 / 69
页数:6
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