共 50 条
- [1] SPIN-ON ARSENIC DIFFUSION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) : C125 - C125
- [2] Etching spin-on trilayer masks [J]. ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV, PTS 1 AND 2, 2008, 6923
- [3] Characterization of spin-on glasses by microindentation [J]. LOW-DIELECTRIC CONSTANT MATERIALS IV, 1998, 511 : 157 - 164
- [4] Nippy spin-on semi films [J]. INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2004, 34 (02): : 127 - 128
- [5] DESORPTION FROM SPIN-ON GLASS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (08) : 2331 - 2335
- [7] Planarized Spin-on Carbon Hardmask [J]. ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVII, 2020, 11326