Analysis and Test of An Optical Scanner Actuated by PZT Films

被引：0
|
作者：
Yuan, Songmei [1 ]
Liu, Weidong [1 ]
Zhuang, Chi [1 ]
机构：
[1] Beijing Univ Aeronaut & Astronaut, Sch Mech Engn & Automat, Beijing 100191, Peoples R China
来源：
HIGH-PERFORMANCE CERAMICS VI | 2010年 / 434-435卷
关键词：
Two-dimensional piezoelectric scanner; PZT film; Finite element analysis;
D O I：
10.4028/www.scientific.net/KEM.434-435.426
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The structure and principle of an optical scanner actuated by PZT films have been presented in this paper. FEA software (ANSYS9.0) has been used to analyze the modal and harmonic characteristics of the scanner to acquire its dynamic characteristic and deformation, on which we base to optimize its structure. Finally, its resonance frequency and displacement were measured through experiment to testify its feasibility. It shows that the piezoelectric scanner can realize two-dimensional scanning at high frequency, and it can be fabricated conveniently because of its simple structure.
引用
收藏
页码：426 / 428
页数：3
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