Analysis and Test of An Optical Scanner Actuated by PZT Films

被引：0
|
作者：
Yuan, Songmei [1 ]
Liu, Weidong [1 ]
Zhuang, Chi [1 ]
机构：
[1] Beijing Univ Aeronaut & Astronaut, Sch Mech Engn & Automat, Beijing 100191, Peoples R China
来源：
HIGH-PERFORMANCE CERAMICS VI | 2010年 / 434-435卷
关键词：
Two-dimensional piezoelectric scanner; PZT film; Finite element analysis;
D O I：
10.4028/www.scientific.net/KEM.434-435.426
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The structure and principle of an optical scanner actuated by PZT films have been presented in this paper. FEA software (ANSYS9.0) has been used to analyze the modal and harmonic characteristics of the scanner to acquire its dynamic characteristic and deformation, on which we base to optimize its structure. Finally, its resonance frequency and displacement were measured through experiment to testify its feasibility. It shows that the piezoelectric scanner can realize two-dimensional scanning at high frequency, and it can be fabricated conveniently because of its simple structure.
引用
收藏
页码：426 / 428
页数：3
相关论文
共 50 条
  • [1] A novel high resolution optical scanner actuated by aerosol deposited PZT films
    Asai, N
    Matsuda, R
    Watanabe, M
    Takayama, H
    Yamada, S
    Mase, A
    Shikida, M
    Sato, K
    Lebedev, M
    Akedo, J
    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 2003, : 247 - 250
  • [2] Microelectromechanical flexure PZT actuated optical scanner: static and resonance behavior
    Smits, JG
    Fujimoto, K
    Kleptsyn, VF
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (06) : 1285 - 1293
  • [3] A laser display using a PZT-actuated 2D optical scanner
    Tani, M
    Akamatsu, M
    Yasuda, Y
    Fujita, H
    Toshiyoshi, H
    IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications, 2005, : 9 - 10
  • [4] A PZT-actuated 2D optical scanner for MEMS image projection display
    Yasuda, Y.
    Tani, M.
    Akamatsu, M.
    Toshiyoshi, H.
    IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2006, : 1587 - +
  • [5] Aerosol Deposited PZT Actuated 2-D Scanner System
    Schipf, David R.
    Chen, Chao-Ting
    Kuo, Chun-Liang
    Chu, Kang-Yu
    Wu, Wen-Jong
    Wang, Wei-Chih
    ACTIVE AND PASSIVE SMART STRUCTURES AND INTEGRATED SYSTEMS 2015, 2015, 9431
  • [6] Aerosol Jet printed PZT actuated MEMS resonating cantilever scanner
    Li, Ming-Yao
    Peng, Kuan-Cheng
    Hsu, Yi-Feng
    Chen, Peng-Jyun
    Tsui, Chi-Leung
    Wu, Wen-Jong
    Wang, Wei-Chih
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXIV, 2020, 11283
  • [7] An optical scanner based on electromagnetically actuated optical fiber
    Hu, Hans P.
    Le, Kevin D.
    Chiao, J. -C.
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XI, 2006, 6109
  • [8] Micromirror actuated by PZT film for optical application
    Nam, HJ
    Cho, SM
    Kim, YS
    Kim, DC
    Bu, JU
    INTEGRATED FERROELECTRICS, 2001, 41 (1-4) : 1715 - 1724
  • [9] Design of a PZT Actuated Cantilever Waveguide Scanner Using an Aerosol Deposition Process
    Schipf, David R.
    Tsui, Chi-Leung
    Kuo, Chun-Liang
    Wang, Yin-Jie
    Wu, Wen-Jong
    Wang, Wei-Chih
    PROCEEDINGS OF 2014 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT), 2014, : 142 - 145
  • [10] A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film
    Naono, Takayuki
    Fujii, Takamichi
    Esashi, Masayoshi
    Tanaka, Shuji
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2014, 24 (01)
12345