Optical characterization of InGaN/GaN multiple quantum well structures grown by metalorganic chemical vapor deposition

被引:0
|
作者
Su, Yan-Kuin [1 ,2 ,3 ]
Cheng, An-Ting [1 ,2 ,3 ]
Lai, Wei-Chi [4 ]
机构
[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, 1 Univ Rd, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[4] Natl Cheng Kung Univ, Inst Elect Opt Sci & Engn, Tainan 70101, Taiwan
关键词
MQW; MOCVD; InGaN; PL; HZXRD; AFM;
D O I
10.1117/12.722693
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical and crystal properties of InGaN/GaN multiple quantum well (MQW) structures grown by metalorganic chemical vapor deposition (MOCVD) were characterized using room-temperature photoluminescence (PL) and high-resolution Xray diffraction (HRXRD), respectively. The near bandgap excitonic peak decreased from 2.77 eV to 2.68 eV while there was a 10 A increase in the well thickness, probably caused by variations of quantized energy levels. In addition, higher growth temperature of MQW structures had a small influence on the pair thickness, but the emission wavelength showed a blueshift attributed to the decrease in average of indium mole fraction. However, the near bandgap excitonic peak remained constant for the thicker quantum barriers. For the PL emission intensity of InGaN/GaN MQW structures, it was enhanced with a thinner quantum well width and a thicker quantum barrier, which could be resulted from the improvement of optical confinement in the quantum well. Moreover, by using the higher growth temperature, enhanced PL intensity was achieved due to the improvement of structure quality for the InGaN/GaN heterostructure. Therefore, these results suggest that the emission wavelength and intensity of the InGaN/GaN MQW-based optical device could be modulated by designing thicknesses of quantum wells as well as growth temperatures of MQW structures.
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页数:7
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