Chemical vapor deposition of boron- and nitrogen-containing graphene thin films

被引:22
|
作者
Suzuki, Satoru [1 ]
Hibino, Hiroki [1 ]
机构
[1] NTT Corp, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
关键词
Graphene; h-BN; CVD; Polycrystalline Ni substrates; CARBON NANOTUBES; DOPED SINGLE; NITRIDE; SPECTRA; LAYERS;
D O I
10.1016/j.mseb.2011.10.001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Boron and nitrogen-incorporated graphene thin films were grown on polycrystalline Ni substrates by thermal chemical vapor deposition using separate boron- and nitrogen-containing feedstocks. Boron and nitrogen atoms were incorporated in the film in almost equal amounts and the total content reached similar to 28%. The film predominantly consisted of separate graphene and boron nitride domains. Carrier concentration in the graphene domains was estimated to be about 1 x 10(-3) e/atom (3.8 x 10(12) cm(-2)) from G band shift in Raman spectra. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:233 / 238
页数:6
相关论文
共 50 条
  • [31] Growth of ZnSe thin films by metalorganic chemical vapor deposition using nitrogen trifluoride
    Noda, Y
    Ishikawa, T
    Yamabe, M
    Hara, Y
    APPLIED SURFACE SCIENCE, 1997, 113 : 28 - 32
  • [32] Nitrogen incorporation in SnO2 thin films grown by chemical vapor deposition
    Jiang, Jie
    Lu, Yinmei
    Kramm, Benedikt
    Michel, Fabian
    Reindl, Christian T.
    Kracht, Max E.
    Klar, Peter J.
    Meyer, Bruno K.
    Eickhoff, Martin
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2016, 253 (06): : 1087 - 1092
  • [33] Toward the commercialization of chemical vapor deposition graphene films
    Jia, Kaicheng
    Zhang, Jincan
    Zhu, Yeshu
    Sun, Luzhao
    Lin, Li
    Liu, Zhongfan
    APPLIED PHYSICS REVIEWS, 2021, 8 (04)
  • [34] Synthesis of hexagonal boron nitride thin films by a plasma assisted chemical vapor deposition method
    Thévenin, P
    Soltani, A
    Bath, A
    JOURNAL DE PHYSIQUE IV, 2001, 11 (PR3): : 803 - 810
  • [35] Nitrogen and boron doped monolayer graphene by chemical vapor deposition using polystyrene, urea and boric acid
    Wu, Tianru
    Shen, Honglie
    Sun, Lei
    Cheng, Bin
    Liu, Bin
    Shen, Jiancang
    NEW JOURNAL OF CHEMISTRY, 2012, 36 (06) : 1385 - 1391
  • [36] XPS, AES, and EELS characterization of nitrogen-containing thin films
    Soto, G
    de la Cruz, W
    Farías, MH
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 2004, 135 (01) : 27 - 39
  • [37] Synthesis, Structure, and Properties of Boron- and Nitrogen-Doped Graphene
    Panchokarla, L. S.
    Subrahmanyam, K. S.
    Saha, S. K.
    Govindaraj, Achutharao
    Krishnamurthy, H. R.
    Waghmare, U. V.
    Rao, C. N. R.
    ADVANCED MATERIALS, 2009, 21 (46) : 4726 - +
  • [38] Hot Filament Chemical Vapor Deposition of Crystalline Boron Films
    Soto, Gerardo
    JOURNAL OF THE KOREAN CERAMIC SOCIETY, 2019, 56 (03) : 269 - 276
  • [39] Growth Mechanism of Graphene on Graphene Films Grown by Chemical Vapor Deposition
    Kang, Cheong
    Jung, Da Hee
    Lee, Jin Seok
    CHEMISTRY-AN ASIAN JOURNAL, 2015, 10 (03) : 637 - 641