On-the-fly;
Galvanometer scanner;
Linear stage;
Synchronization;
D O I:
10.1016/j.phpro.2011.03.156
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
This paper presents an on-the-fly method to synchronize a laser galvanometer scanner and a linear stage for fast and wide area fabrication. The location and velocity information of a linear stage is transferred to the galvanometer scanner control board by the encoder signal. The scanner control board calculates amount of laser beam movement subtracting from original CAD data to linear stage movement. On-the-fly method is different from existing step & scanning method that it ensures continuous stage movement and real time signal transfer between the linear stage and the galvanometer scanner.
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Wang, Shikai
Li, Zhilan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Univ Chinese Acad Sci, Beijing 100039, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Li, Zhilan
Yu, Chunlei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Yu, Chunlei
Wang, Meng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Wang, Meng
Feng, Suya
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Feng, Suya
Zhou, Qinling
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Zhou, Qinling
Chen, Danping
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
Chen, Danping
Hu, Lili
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
机构:
Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Rao, Ratish Rao Nagaraj
Bienert, Florian
论文数: 0引用数: 0
h-index: 0
机构:
Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, GermanyUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Bienert, Florian
Moeller, Michael
论文数: 0引用数: 0
h-index: 0
机构:
AMO GmbH, Otto Blumenthal Str 25, D-52074 Aachen, GermanyUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Moeller, Michael
Bashir, Danish
论文数: 0引用数: 0
h-index: 0
机构:
Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, GermanyUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Bashir, Danish
Hamri, Alina
论文数: 0引用数: 0
h-index: 0
机构:
Manutech USD, Bailment Hautes Technol,20 Rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Hamri, Alina
Celle, Frederic
论文数: 0引用数: 0
h-index: 0
机构:
Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Celle, Frederic
Gamet, Emilie
论文数: 0引用数: 0
h-index: 0
机构:
Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Gamet, Emilie
Ahmed, Marwan Abdou
论文数: 0引用数: 0
h-index: 0
机构:
Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, GermanyUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France
Ahmed, Marwan Abdou
Jourlin, Yves
论文数: 0引用数: 0
h-index: 0
机构:
Univ Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Inst Opt, Lab Hubert Curien, CNRS,Grad Sch,UJM St Etienne,UMR 5516, 18 Rue Prof Benoit Lauras, F-42000 St Etienne, France