Laser Scanner Stage On-The-Fly Method for ultrafast and wide Area Fabrication

被引:11
|
作者
Kim, Kyunghan
Yoon, Kwangho
Suh, Jeong
Lee, Jaehoon
机构
关键词
On-the-fly; Galvanometer scanner; Linear stage; Synchronization;
D O I
10.1016/j.phpro.2011.03.156
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper presents an on-the-fly method to synchronize a laser galvanometer scanner and a linear stage for fast and wide area fabrication. The location and velocity information of a linear stage is transferred to the galvanometer scanner control board by the encoder signal. The scanner control board calculates amount of laser beam movement subtracting from original CAD data to linear stage movement. On-the-fly method is different from existing step & scanning method that it ensures continuous stage movement and real time signal transfer between the linear stage and the galvanometer scanner.
引用
收藏
页码:452 / 458
页数:7
相关论文
共 26 条
  • [21] Fabrication System for Large-Area Seamless Nanopatterned Cylinder Mold Using the Spiral Laser Interference Exposure Method
    Yong-Won Ma
    Jun Han Park
    Sung Jae Lee
    Jeonghoon Lee
    Suchan Cho
    Bo Sung Shin
    International Journal of Precision Engineering and Manufacturing-Green Technology, 2023, 10 : 1 - 7
  • [22] Fabrication of pH -Responsive Polyimide Polyacrylic Acid Smart Gating Membranes: Ultrafast Method Using 248 nm Krypton Fluoride Excimer Laser
    Patil, Renuka Subhash
    Sancaktar, Erol
    ACS APPLIED MATERIALS & INTERFACES, 2021, 13 (21) : 24431 - 24441
  • [23] FABRICATION OF BROAD-AREA LASER-DIODES ON A 3-INCH WAFER BY A SOLID-PHASE DIFFUSION METHOD
    NAGAI, Y
    SHIGIHARA, K
    SAITO, H
    WATANABE, H
    KARAKIDA, S
    OTSUBO, M
    IKEDA, K
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (05) : 464 - 466
  • [24] Ambient-air in situ fabrication of high-surface-area, superhydrophilic, and microporous few-layer activated graphene films by ultrafast ultraviolet laser for enhanced energy storage
    Liu, Huilong
    Zheng, Yixin
    Moon, Kyoung-Sik
    Chen, Yun
    Shi, Dachuang
    Chen, Xin
    Wong, Ching-Ping
    NANO ENERGY, 2022, 94
  • [25] Fabrication and laser behaviors of Yb3+ doped silica large mode area photonic crystal fiber prepared by sol-gel method
    Wang, Shikai
    Li, Zhilan
    Yu, Chunlei
    Wang, Meng
    Feng, Suya
    Zhou, Qinling
    Chen, Danping
    Hu, Lili
    OPTICAL MATERIALS, 2013, 35 (09) : 1752 - 1755
  • [26] Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography
    Rao, Ratish Rao Nagaraj
    Bienert, Florian
    Moeller, Michael
    Bashir, Danish
    Hamri, Alina
    Celle, Frederic
    Gamet, Emilie
    Ahmed, Marwan Abdou
    Jourlin, Yves
    OPTICS EXPRESS, 2023, 31 (01) : 371 - 380