Laser Scanner Stage On-The-Fly Method for ultrafast and wide Area Fabrication

被引:11
|
作者
Kim, Kyunghan
Yoon, Kwangho
Suh, Jeong
Lee, Jaehoon
机构
关键词
On-the-fly; Galvanometer scanner; Linear stage; Synchronization;
D O I
10.1016/j.phpro.2011.03.156
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper presents an on-the-fly method to synchronize a laser galvanometer scanner and a linear stage for fast and wide area fabrication. The location and velocity information of a linear stage is transferred to the galvanometer scanner control board by the encoder signal. The scanner control board calculates amount of laser beam movement subtracting from original CAD data to linear stage movement. On-the-fly method is different from existing step & scanning method that it ensures continuous stage movement and real time signal transfer between the linear stage and the galvanometer scanner.
引用
收藏
页码:452 / 458
页数:7
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