Row/Column Addressing of Scalable Silicon Photonic MEMS Switches

被引：0
|
作者：
Quack, Niels [1 ]
Seok, Tae Joon [1 ]
Han, Sangyoon [1 ]
Zhang, Wencong [1 ]
Muller, Richard S. [1 ]
Wu, Ming C. [1 ]
机构：
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源：
2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2015年
关键词：
MEMS; Silicon Photonics; Optical Circuit Switch (OCS); Photonic Integrated Circuit (PIC);
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a scalable silicon photonic MEMS switch with an actuation scheme requiring only 2N electrical contacts for an NxN switch matrix. Unit cell size is 145 mu m x 145 mu m and switching loss 1.5dB at 1550nm.
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页数：2
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