Effect of substrate origin on stability of electrical conductivity of SnO2 thin polycrystalline films

被引：0
|
作者：
Ivashchenko, A [1 ]
Kerner, I [1 ]
Maronchuk, I [1 ]
机构：
[1] Acad Sci Moldova, Inst Appl Phys, Chisinau 2028, Moldova
来源：
2000 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, CAS 2000 PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The variation of electrical conductivity induced by annealing in SnO2 thin films deposited on three types of substrate is considered. The effect of substrate origin on stability of electrical conductivity is discussed.
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页码：139 / 142
页数：4
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