Microfabricated transition-edge x-ray detectors

被引：71
|
作者：
Hilton, GC
Martinis, JM
Irwin, KD
Bergren, NF
Wollman, DA
Huber, ME
Deiker, S
Nam, SW
机构：
[1] Natl Inst Stand & Technol, Boulder, CO 80303 USA
[2] Univ Colorado, Dept Phys, Denver, CO 80217 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2001年 / 11卷 / 01期
关键词：
x-ray detectors; IR detectors; microcalorimeter; x-ray spectrometry;
D O I：
10.1109/77.919451
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We are developing high performance x-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5 +/- 0.1 eV for 5.9 keV x-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal boundary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this paper we present details of fabrication and performance of these devices.
引用
收藏
页码：739 / 742
页数：4
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