Direct Observation of Heat Transport in Plural AlN Films Using Thermal Imaging and Transient Thermal Reflectance Method

被引：3

作者：

Lee, Taehun ^{[1
]}

Burzo, Mihai G. ^{[2
]}

Komarov, Pavel L. ^{[2
]}

Raad, Peter E. ^{[2
]}

Kim, M. J. ^{[1
]}

机构：

[1] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA

[2] So Methodist Univ, Dept Mech Engn, Dallas, TX 75275 USA

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2011年 / 14卷 / 05期

关键词：

THIN-FILMS; CONDUCTIVITY MEASUREMENTS;

D O I：

10.1149/1.3543896

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Transient thermal reflectance and thermal imaging were used to examine heat transport through AlN thin films deposited on Si substrates. The effective thermal conductivity of thin-film AlN was found to be in the range of 2-7 W/mK, depending on the microstructure of the film. Experimental thermal imaging comparisons also indicate a 32% higher heat dissipation efficiency for AlN films compared with SiO2 films of similar thickness. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3543896] All rights reserved.

引用

页码：H184 / H186

页数：3

共 50 条

[1] Transient thermal imaging using thermo reflectance
Maize, K.
Christofferson, J.
Shakouri, A.
TWENTY FOURTH ANNUAL IEEE SEMICONDUCTOR THERMAL MEASUREMENT AND MANAGEMENT SYMPOSIUM, PROCEEDINGS 2008, 2008, : 56 - 59
[2] OBSERVATION OF TRANSIENT ABSORPTION BY USING THE THERMAL LENS METHOD
TERAZIMA, M
AZUMI, T
APPLIED PHYSICS LETTERS, 1989, 54 (24) : 2398 - 2399
[3] Experimental observation of ballistic to diffusive transition in phonon thermal transport of AlN thin films
Hoque, Md Shafkat Bin
Koh, Yee Rui
Zare, Saman
Liao, Michael E.
Huynh, Kenny
Goorsky, Mark S.
Liu, Zeyu
Shi, Jingjing
Graham, Samuel
Luo, Tengfei
Ahmad, Habib
Doolittle, W. Alan
Hopkins, Patrick E.
Applied Physics Letters, 2024, 125 (26)
[4] Transient behavior of heat transport in a thermal switch
Cuansing, Eduardo C.
Wang, Jian-Sheng
PHYSICAL REVIEW B, 2010, 81 (05):
[5] Observation of ballistic-diffusive thermal transport in GaN transistors using thermoreflectance thermal imaging
Liu, Zhi-Ke
Shen, Yang
Li, Han-Ling
Cao, Bing-Yang
RARE METALS, 2024, 43 (01) : 389 - 394
[6] Observation of ballistic-diffusive thermal transport in GaN transistors using thermoreflectance thermal imaging
Zhi-Ke Liu
Yang Shen
Han-Ling Li
Bing-Yang Cao
Rare Metals, 2024, 43 (01) : 389 - 394
[7] Reduced thermal quadrupole heat transport modeling in harmonic and transient regime scanning thermal microscopy using nanofabricated thermal probes
Bodzenta, J.
Chirtoc, M.
Juszczyk, J.
JOURNAL OF APPLIED PHYSICS, 2014, 116 (05)
[8] Characterization for Graphene as Heat Spreader Using Thermal Imaging Method
Huang, Shirong
Zhang, Yong
Sun, Shuangxi
Fan, Xiaogang
Wang, Ling
Fu, Yifeng
Zhang, Yan
Liu, Johan
2013 14TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2013, : 403 - +
[9] THERMAL IMAGING USING ORGANIC FILMS
ROBERTS, GG
HOLCROFT, B
THIN SOLID FILMS, 1989, 180 : 211 - 216
[10] Thermal conductivity measurement of AlN films by fast photothermal method.
Aissa, K. Ait
Semmar, N.
Meneses, D. De Sousa
Le Brizoual, L.
Gaillard, M.
Petit, A.
Jouan, P-Y
Boulmer-Leborgne, C.
Djouadi, M. A.
6TH EUROPEAN THERMAL SCIENCES CONFERENCE (EUROTHERM 2012), 2012, 395

← 1 2 3 4 5 →