Miniature and tunable millimeter-wave lowpass filter with MEMS switch

被引:6
|
作者
Guo, X. L. [1 ]
Jin, Y. [2 ]
机构
[1] Nantong Univ, Sch Elect & Informat, Nantong 226019, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
关键词
Tunable filters; Multiple-contact MEMS switches; Self-similar structures;
D O I
10.1016/j.sse.2011.05.012
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, fully monolithic tunable millimeter-wave filters with tapped-line feedings are proposed using the CPW-based periodic structures with novel multiple-contact MEMS switches. Millimeter-wave low-pass filters were designed, fabricated, and tested. The cascaded CPW-based periodic structures, with low-pass intrinsic filtering characteristics, are reconfigured into a self-similar single unit cell by the operation of the novel multiple-contact MEMS switches with single actuation. The measured results of the reconfigurable low-pass filter show the 3-dB cutoff frequency change from 19 to 11 GHz with very small change in the average insertion loss from 1.3 to 1.9 dB. The chip size of the low-pass is 4.0 mm x 1.6 mm. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:145 / 148
页数:4
相关论文
共 50 条
  • [31] Design of A Millimeter-wave MEMS Antenna Array
    Dai, Yong-sheng
    Sun, Hong-tu
    Li, Ping
    Yin, Hong-hao
    2012 IEEE ASIA-PACIFIC CONFERENCE ON ANTENNAS AND PROPAGATION (APCAP), 2012, : 39 - 40
  • [32] Design of Millimeter-Wave Reconfigurable Bandstop Filter Using CMOS-MEMS Technology
    Hsieh, Sheng-Chi
    Chen, Chien-Hsun
    Lin, Chun-Chi
    Chang, Chia-Chan
    2011 41ST EUROPEAN MICROWAVE CONFERENCE, 2011, : 1095 - 1098
  • [33] Design of Millimeter-Wave Reconfigurable Bandstop Filter Using CMOS-MEMS Technology
    Hsieh, Sheng-Chi
    Chen, Chien-Hsun
    Lin, Chun-Chi
    Chang, Chia-Chan
    2011 6TH EUROPEAN MICROWAVE INTEGRATED CIRCUIT CONFERENCE, 2011, : 534 - 537
  • [34] A high performance MEMS miniature tunable bandpass filter
    Abbaspour-Tamijani, A
    Dussopt, L
    Rebeiz, GM
    2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : 1785 - 1788
  • [35] Miniature Microwave RF MEMS Tunable Waveguide Filter
    Scarbrough, Derek
    Goldsmith, Charles
    Papapolymerou, John
    Li, Yuan
    2009 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, 2009, : 1860 - +
  • [36] Miniature Microwave RF MEMS Tunable Waveguide Filter
    Scarbrough, Derek
    Goldsmith, Charles
    Papapolymerou, John
    Li, Yuan
    2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009), 2009, : 507 - +
  • [37] Design of a compact millimeter-wave elliptic low-pass filter with wide stopband and tunable features for precision millimeter-wave measurement systems
    Zuo, Zhong-hao
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2025, 36 (03)
  • [38] Tunable MEMS filters for millimeter wave applications
    Takacs, A.
    Neculoiu, D.
    Vasilache, D.
    Muller, A.
    Pons, P.
    Aubert, H.
    Plana, R.
    2006 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, 2007, : 115 - +
  • [39] Millimeter-Wave RF-MEMS SPDT Switch Networks in a SiGe BiCMOS Process Technology
    Reyaz, S.
    Samuelsson, C.
    Malmqvist, R.
    Kaynak, M.
    Rydberg, A.
    2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC), 2012, : 1071 - 1074
  • [40] Simulation and design of structure for experimental verification of self-actuation of millimeter-wave MEMS switch
    Xiao J.
    Liao X.
    Zhou Y.
    Dongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Southeast University (Natural Science Edition), 2011, 41 (05): : 923 - 928