High mechanical stable flexible transparent conductive In-doped CdO thin film deposited at low temperature on PET substrate

To explore new kind of flexible transparent conductive oxide films for application in flexible optoelectronic devices, In-doped CdO thin films were synthesized by radio frequency magnetron sputtering on thin polyethylene terephthalate substrates at low temperature. The effects of growth time and temperature on the resistance and transmittance of In-doped CdO films were studied in detail for the first time. It is demonstrated that the sheet resistance of the film deposited at 100 degrees C for 20 min was 96.9 omega/cm(2) for the as-grown sample and increased about 6.4% after experienced 500 bending cycles. The results demonstrate that the In-doped CdO films possess not only excellent opto-electronic properties but also high mechanical stability. In-doped CdO films show great potential to be applied in wearable electronics, transparent devices, solar cells and so forth.