COMBINED CONDUCTIVITY AND GRAVIMETRIC RESONANT GAS SENSOR FOR HIGH-TEMPERATURE APPLICATIONS

被引：0
|
作者：
Schroeder, Sebastian [1 ]
Fritze, Holger [1 ]
机构：
[1] Tech Univ Clausthal, Goslar, Germany
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
关键词：
Gas sensor; high-temperature; thin films; metal oxide; bulk acoustic wave;
D O I：
10.1109/transducers.2019.8808747
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A bulk acoustic wave gas sensor system based on high temperature stable piezoelectric transducers and thin metal oxide sensor films is developed. The simultaneous determination of changes in electrical and gravimetric properties of tin, oxide (SnO2), titanium oxide (TiO2) and praseodymium doped ceria (PCO, PrxCe1-xO2 with x = 0.1 and 0.2) sensor films enables to distinguish methane and ethylene in inert gas atmospheres (argon) at temperatures up to 900 degrees C.
引用
收藏
页码：1161 / 1164
页数：4
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