Design, fabrication and characterization of a novel electrostatically actuated optical fiber switch

被引:0
|
作者
Herding, M [1 ]
Wischke, M [1 ]
Woias, P [1 ]
机构
[1] Univ Freiburg, Lab Design Microsyst, IMTEK, D-79110 Freiburg, Germany
关键词
D O I
10.1109/OMEMS.2005.1540122
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:149 / 150
页数:2
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