共 50 条
- [1] Design and fabrication of novel compliant electrostatically actuated microvalves NEMS/MEMS TECHNOLOGY AND DEVICES, 2009, 74 : 179 - 182
- [3] Design and fabrication of an electrostatically actuated MEMS probe card BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 1522 - 1525
- [4] Design and fabrication of an electrostatically actuated microdeformable focusing mirror JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2011, 10 (01):
- [6] Electrostatically actuated micro-fluidic optical cross-connect switch 2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2003, : 47 - 48
- [7] Electrostatically actuated moving-fibre switch 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST, 2002, : 111 - 112
- [8] Electrostatically actuated MEMS switch with resistive contact INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2014, 2014, 9440
- [9] Capillary optical fiber - Design, fabrication, characterization and application Bull. Pol. Acad. Sci. Tech. Sci., 2008, 2 (87-102):