Characterization of Direct Piezoelectric Properties for Vibration Energy Harvesting

被引：11
|
作者：
Yoshimura, Takeshi [1 ]
Miyabuchi, Hiroki [1 ]
Murakami, Syuichi [2 ]
Ashida, Atsushi [1 ]
Fujimura, Norifumi [1 ]
机构：
[1] Osaka Prefecture Univ, Naka Ku, 1-1 Gakuen Cho, Sakai, Osaka 5998531, Japan
[2] Technol Res Inst Osaka Prefecture, Izumi, Osaka 5941157, Japan
来源：
3RD INTERNATIONAL CONGRESS ON CERAMICS (ICC3): ADVANCES IN ELECTRO CERAMICS | 2011年 / 18卷
关键词：
POWER GENERATOR; THIN-FILMS; MEMS; FABRICATION; GROWTH;
D O I：
10.1088/1757-899X/18/9/092026
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Direct piezoelectric effect of Pb(Zr,Ti)O-3 (PZT) thin films was investigated to discuss the application of ferroelectric films to vibration energy harvesting. From the model of the piezoelectric vibration energy harvester, it was found that the figure of merit (FOM) is proportional of the square of the effective transverse piezoelectric coefficient e(31,f). The e(31,f) coefficient of PZT films were measured by substrate bending method. Furthermore, it was found that the e(31,f) coefficient increases with increasing strain, which is favourable for the vibration energy harvesting.
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页数：4
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