A flexible capacitive pressure sensor based on an electrospun polyimide nanofiber membrane

被引:52
|
作者
Zhu, Yuchao [1 ,2 ]
Wu, Yigen [1 ,2 ]
Wang, Guangshun [1 ,2 ]
Wang, Zhongbao [1 ,2 ]
Tan, Qiulin [3 ]
Zhao, Libo [4 ]
Wu, Dezhi [1 ,2 ]
机构
[1] Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China
[2] Xiamen Univ, Shenzhen Res Inst, Shenzhen 518057, Peoples R China
[3] North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China
[4] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
基金
中国国家自然科学基金;
关键词
FORCE SENSOR; SKIN; COMPOSITE;
D O I
10.1016/j.orgel.2020.105759
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A flexible capacitive pressure sensor based on electrospun polyimide (PI) nanofiber membrane as a dielectric layer has been proposed to improve its performance including sensitivity, detection limit and response speed due to its loose structures. An electrospun PI nanofiber membrane, a commercial PI tape and a PDMS membrane as dielectric layer had been tested and diverse thicknesses of PI nanofiber membranes were explored to optimize the dielectric layer. The sensor with such a dielectric layer exhibited high sensitivity (2.204 kPa−1 at 3.5–4.1 Pa), wide scale range (0–1.388 MPa), low detection limit (3.5 Pa) and good cyclic stability (>10,000 cycles). A typical 4 × 4 sensor array could not only accurately sense corresponding force, but also identify the slide of force by monitoring dynamic capacitive changes of elements. © 2020 Elsevier B.V.
引用
收藏
页数:8
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