Design, fabrication and characterization of plasmonic gratings for SERS

被引：13

作者：

Romanato, F. ^{[1
,2
,4
]}

Pilot, R. ^{[3
]}

Massari, M. ^{[1
,2
]}

Ongarello, T. ^{[1
,2
]}

Pirruccio, G. ^{[1
]}

Zilio, P. ^{[1
,2
]}

Ruffato, G. ^{[1
,2
]}

Carli, M. ^{[1
,2
]}

Sammito, D. ^{[2
,4
]}

Giorgis, V. ^{[2
,4
]}

Garoli, D. ^{[1
,2
,4
]}

Signorini, R. ^{[3
]}

Schiavuta, P. ^{[5
]}

Bozio, R. ^{[3
]}

机构：

[1] Univ Padua, Dept Phys, I-35131 Padua, Italy

[2] LaNN Lab Nanofabricat Nanodevices, I-35127 Padua, Italy

[3] Consortium INSTM, Dept Chem Sci, I-35131 Padua, Italy

[4] IOM CNR TASC Lab, Basovizza Trieste, Italy

[5] Interuniv Consortium Nanotechnol Veneto Reg, CIVEN, I-30175 Venice, Italy

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 08期

关键词：

Electron beam lithography; Plasmonic; EOT; SERS; ENHANCED RAMAN-SCATTERING;

D O I：

10.1016/j.mee.2011.02.052

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to fabricate SERS-active substrates suitable for sensing applications, reproducibility and efficiency issues must be tackled. Innovative nanofabrication techniques allow the preparation of substrates reproducible and easy to model. Theoretical modelling provides a very powerful method for optimizing the design of such substrates, i.e. tailoring their geometrical parameters for optimizing the optical response. In particular in this work a 1D digital metallic grating has been theoretically investigated to identify the configuration corresponding to the localization of the near-field radiation inside the slits. This chip has been fabricated by electron beam lithography (EBL) and electrolytic growth. The Raman enhancement factor of the chip has been measured and compared with the theoretical estimation. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2717 / 2720

页数：4

共 50 条

[31] Design of a Plasmonic Platform to Improve the SERS Sensitivity for Molecular Detection
Dab, Chahinez
Thomas, Reji
Ruediger, Andreas
PHOTONIC SENSORS, 2020, 10 (03) : 204 - 214
[32] Simulation and fabrication of multi-layer plasmonic substrates for potential SERS application
Jagathpriya, L. M.
Dutta-Gupta, Shourya
2022 WORKSHOP ON RECENT ADVANCES IN PHOTONICS (WRAP), 2022, : 193 - 194
[33] Fabrication and SERS properties of complex and organized nanoparticle plasmonic clusters stable in solution
Blanco-Formoso, Maria
Pazos-Perez, Nicolas
Alvarez-Puebla, Ramon A.
NANOSCALE, 2020, 12 (28) : 14948 - 14956
[34] Design of a Plasmonic Platform to Improve the SERS Sensitivity for Molecular Detection
Chahinez Dab
Reji Thomas
Andreas Ruediger
Photonic Sensors, 2020, 10 : 204 - 214
[35] Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene
Kumagai, Hayato
Honma, Hiroaki
Ishida, Makoto
Sawada, Kazuaki
Takahashi, Kazuhiro
DISPLAYS, 2016, 45 : 63 - 69
[36] Plasmonic nanodevice with magnetic funcionalities: fabrication and characterization
Galvez, F.
del Valle, J.
Gomez, A.
Osorio, M. R.
Granados, D.
Perez de Lara, D.
Garcia, M. A.
Vicent, J. L.
OPTICAL MATERIALS EXPRESS, 2016, 6 (10): : 3086 - 3096
[37] Fabrication and characterization of plasmonic nanolens for applications in biophotonics
De Angelis, F.
Das, Gobind
Liberale, C.
Mecarini, F.
Matteucci, M.
Di Fabrizio, E.
MICROELECTRONIC ENGINEERING, 2008, 85 (5-6) : 1286 - 1288
[38] Fabrication and Characterization of Flexible and Tunable Plasmonic Nanostructures
Mehmet Kahraman
Pallavi Daggumati
Ozge Kurtulus
Erkin Seker
Sebastian Wachsmann-Hogiu
Scientific Reports, 3
[39] Fabrication and Characterization of Flexible and Tunable Plasmonic Nanostructures
Kahraman, Mehmet
Daggumati, Pallavi
Kurtulus, Ozge
Seker, Erkin
Wachsmann-Hogiu, Sebastian
SCIENTIFIC REPORTS, 2013, 3
[40] Plasmonic Nanosensors: Design, Fabrication, and Applications in Biomedicine
Nocerino, Valeria
Miranda, Bruno
Tramontano, Chiara
Chianese, Giovanna
Dardano, Principia
Rea, Ilaria
De Stefano, Luca
CHEMOSENSORS, 2022, 10 (05)

← 1 2 3 4 5 →