Indium phosphide resonant chemical sensor with a monolithically integrated optical readout scheme

被引：4
|
作者：
Siwak, N. P. [1 ]
Fan, X. Z. [1 ]
Goldsman, N. [1 ]
Ghodssi, R. [1 ]
机构：
[1] Univ Maryland, Syst Res Inst, Dept Elect & Comp Engn, MEMS Sensors & Actuators Lab, College Pk, MD 20742 USA
来源：
2007 IEEE SENSORS, VOLS 1-3 | 2007年
关键词：
D O I：
10.1109/ICSENS.2007.4388681
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
We present a novel MEMS cantilever wavegaide resonator sensing platform utilizing for the first time an integrated photodiode readout scheme. This platform uses Indium Phosphide (InP) to enable the monolithic integration of passive waveguides with active optical components. Cantilever waveguide resonators were successfully fabricated with integrated PIN photodiodes for displacement measurement. On-chip integration of the readout provides a 70% improvement in mass sensitivity compared to off-chip photodetector designs. We have successfully fabricated cantilever waveguides with integrated photodetectors and experimentally characterize these cantilever, sensors with monolithically integrated PIN photodiodes.
引用
收藏
页码：1428 / 1431
页数：4
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