Indium phosphide resonant chemical sensor with a monolithically integrated optical readout scheme

We present a novel MEMS cantilever wavegaide resonator sensing platform utilizing for the first time an integrated photodiode readout scheme. This platform uses Indium Phosphide (InP) to enable the monolithic integration of passive waveguides with active optical components. Cantilever waveguide resonators were successfully fabricated with integrated PIN photodiodes for displacement measurement. On-chip integration of the readout provides a 70% improvement in mass sensitivity compared to off-chip photodetector designs. We have successfully fabricated cantilever waveguides with integrated photodetectors and experimentally characterize these cantilever, sensors with monolithically integrated PIN photodiodes.