Effects of substrate temperatures on the structure and properties of hafnium dioxide films

被引：17
|
作者：
Jiao, Hongfei [1 ,2 ,3 ]
Cheng, Xinbin [1 ,2 ]
Lu, Jiangtao [1 ,2 ]
Bao, Ganghua [1 ,2 ]
Liu, Yongli [1 ,2 ]
Ma, Bin [1 ,2 ,3 ]
He, Pengfei [3 ]
Wang, Zhanshan [1 ,2 ]
机构：
[1] Tongji Univ, Dept Phys, Inst Precis Opt Engn, Shanghai 200092, Peoples R China
[2] Shanghai Key Lab Special Artificial Microstruct M, Shanghai 200092, Peoples R China
[3] Tongji Univ, Sch Aerosp Engn & Appl Mech, Shanghai 200092, Peoples R China
来源：
APPLIED OPTICS | 2011年 / 50卷 / 09期
基金：
中国国家自然科学基金; 中国博士后科学基金;
关键词：
ION-ASSISTED DEPOSITION; THIN-FILMS; OPTICAL-PROPERTIES; REACTIVE EVAPORATION; HFO2; COATINGS;
D O I：
10.1364/AO.50.00C309
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Different HfO2 monolayers under different deposition conditions, such as substrate temperature and oxygen partial pressure, were prepared from metal hafnium using the reactive electron beam evaporation method. X-ray diffraction was applied to determine the crystalline phase of these films, the surface morphology of the samples was examined by atomic force microscopy, and the optical properties were analyzed using a spectrophotometer and the surface thermal lens technique. The relationship between substrate temperature and film characteristic was investigated, and the correlation between the observed film properties and the laser damage threshold was also discussed. (C) 2011 Optical Society of America
引用
收藏
页码：C309 / C315
页数：7
相关论文
共 50 条
  • [21] Study of Substrate Temperatures Effects on the Properties of Ultrasonically Sprayed SnS2 Thin Films
    Hadef, Zakaria
    Kamli, Kenza
    Zaidi, Beddiaf
    Boulkhessaim, Salim
    Chouial, Baghdadi
    JOURNAL OF NANO RESEARCH, 2023, 77 : 105 - 118
  • [22] Effects of substrate temperatures on the microstructure and the magnetic properties of Cu2MnAl thin films
    Huang, MD
    Lee, NN
    Kim, BJ
    Hong, BS
    Lee, YP
    Kudryavtsev, YV
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 46 : S150 - S153
  • [23] Atomic layer deposition of hafnium dioxide films from hafnium hydroxylamide and water
    Kukli, K
    Ritala, M
    Leskelä, M
    Sajavaara, T
    Keinonen, J
    Jones, AC
    Tobin, NL
    CHEMICAL VAPOR DEPOSITION, 2004, 10 (02) : 91 - 96
  • [24] Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films
    Chowdhury, S
    Laugier, MT
    Rahman, IZ
    THIN SOLID FILMS, 2004, 447 : 174 - 180
  • [25] EFFECTS OF SUBSTRATE BIAS ON THE STRUCTURE AND MAGNETIC PROPERTIES OF SPUTTERED TbFe FILMS.
    Kobe, H.
    Honda, S.
    Nawate, M.
    Ohkoshi, M.
    Kusuda, T.
    IEEE translation journal on magnetics in Japan, 1984, TJMJ-1 (05): : 629 - 630
  • [26] Effects of solid substrate on structure and properties of casting waterborne polyurethane/carboxymethylchitin films
    Zeng, M
    Zhang, LN
    Zhou, YX
    POLYMER, 2004, 45 (10) : 3535 - 3545
  • [27] Dielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films
    Adelmann, C.
    Sriramkumar, V.
    Van Elshocht, S.
    Lehnen, P.
    Conard, T.
    De Gendt, S.
    APPLIED PHYSICS LETTERS, 2007, 91 (16)
  • [28] OPTICAL PROPERTIES AND STRUCTURE OF ZIRCONIUM DIOXIDE FILMS
    SVIRIDOVA, AI
    OPTIKA I SPEKTROSKOPIYA, 1962, 13 (03): : 425 - 428
  • [29] OPTICAL PROPERTIES AND STRUCTURE OF CERIUM DIOXIDE FILMS
    HASS, G
    RAMSEY, JB
    THUN, R
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1958, 48 (05) : 324 - 327
  • [30] Effects of bias voltage on the structure, mechanical properties and tribological properties of TaBx films at elevated temperatures
    Sun, Longlong
    Li, Hang
    Wei, Ningxin
    Li, Jianliang
    Huang, Jiewen
    Kong, Jian
    Wu, Qiujie
    Shi, Yan
    Xiong, Dangsheng
    INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2024, 118
12345