Working group report of database construction of secondary electron yield

被引：2

作者：

Nagatomi, T. ^{[1
]}

Goto, K. ^{[2
]}

Shimizu, R. ^{[3
]}

机构：

[1] Osaka Univ, Dept Mat & Life Sci, Grad Sch Engn, Suita, Osaka 5650871, Japan

[2] Natl Inst Adv Ind Sci & Technol AIST Chubu, Moriyama Ku, Nagoya, Aichi 4638560, Japan

[3] Int Inst Adv Studies, Kyoto 6190225, Japan

来源：

SURFACE AND INTERFACE ANALYSIS | 2010年 / 42卷 / 10-11期

关键词：

secondary electron yield; database; insulator;

D O I：

10.1002/sia.3569

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this report, we briefly introduce the plan of activities of the 141st Committee on Microbeam Analysis of Japan Society for the Promotion of Science (JSPS141)- a working group (WG) for the database construction of the secondary electron yield (SEY) (JSPS141-WG-SEY). The WG is established for the construction of databases of experimentally obtained SEYs and two physical constants to describe secondary electron (SE) emission with the help of Monte Carlo (MC) simulation. We also propose a new technique to measure the SEY of insulator by the charge amplification method. Copyright (C) 2010 John Wiley & Sons, Ltd.

引用

页码：1541 / 1543

页数：3

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