Shear-force atomic force microscope by using the second resonance regime of tuning fork probe

被引：0
|
作者：
Liu, Zhuang [1 ,2 ]
Zhang, Ying [1 ]
Kok, Shaw Wei [1 ]
Ng, Boon Ping [1 ]
Soh, Yeng Chai [2 ]
机构：
[1] Singapore Inst Mfg Technol, Singapore 638075, Singapore
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源：
APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 19期
关键词：
SCANNING OPTICAL MICROSCOPY;
D O I：
10.1063/1.3518057
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An imaging scheme of shear-force atomic force microscope is proposed by exploiting the second resonance regime of the tuning fork probe. Theoretical analysis and experimental results demonstrate that the imaging scheme can deliver better sensitivity and higher resolution of topographic imaging. (C) 2010 American Institute of Physics. [doi:10.1063/1.3518057]
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页数：3
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