Compact Device for CO2 Optical Sensing using Macroporous Silicon Photonic Crystals

被引：0

作者：

Vega, Didac ^{[1
]}

Rodriguez, Angel ^{[1
]}

Calavia, Raul ^{[2
]}

Vilanova, Xavier ^{[2
]}

Trifonov, Trifon ^{[3
]}

机构：

[1] Univ Politecn Cataluna, Dept Elect Engn, ES-08034 Barcelona, Spain

[2] Univ Rovira & Virgili, Dept Elect & Automat, E-43007 Tarragona, Spain

[3] Univ Politecn Cataluna, Ctr Recerca Nanoengn, E-08028 Barcelona, Spain

来源：

PROCEEDINGS OF THE 2015 10TH SPANISH CONFERENCE ON ELECTRON DEVICES (CDE) | 2015年

关键词：

electrochemical etching; macroporous silicon; chemical sensors; gas sensors; SENSORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 mu m, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.

引用

页码：69 / +

页数：3

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