Bidirectional Electrothermal Actuator With Z-Shaped Beams

被引：37
|
作者：
Zhu, Yong [1 ]
Moheimani, S. O. Reza [2 ]
Yuce, Mehmet Rasit [3 ]
机构：
[1] Griffith Univ, Sch Engn, Gold Coast 4222, Australia
[2] Univ Newcastle, Sch Elect Engn & Comp Sci, Newcastle, NSW 2308, Australia
[3] Monash Univ, Dept Elect & Comp Syst Engn, Clayton, Vic 3800, Australia
来源：
IEEE SENSORS JOURNAL | 2012年 / 12卷 / 07期
基金：
澳大利亚研究理事会;
关键词：
Bidirectional motion; electrothermal actuator; microsystem design;
D O I：
10.1109/JSEN.2012.2194141
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process. To achieve small stiffness without buckling, which tends to occur in V-shaped actuators, a new Z-shaped electrothermal actuator is designed. With the actuation current from -13 mA to +13 mA, the electrothermal actuator can achieve a bidirectional motion in a dynamic range from -11.6 mu m to +12.8 mu m. Experimentally obtained frequency response of the actuator indicates that it has a bandwidth of 49 Hz.
引用
收藏
页码：2508 / 2509
页数：2
相关论文
共 50 条
  • [11] Material and performance characterization of Z-shaped nickel electrothermal micro-actuators
    Pimpin, Alongkorn
    Charoenbunyarit, Ittipol
    Srituravanich, Werayut
    SENSORS AND ACTUATORS A-PHYSICAL, 2017, 253 : 49 - 58
  • [12] Dynamic Electro-thermal Modeling of V- and Z-shaped Electrothermal Microactuator
    Zhang, Zhuo
    Yu, Yueqing
    Liu, Xinyu
    Zhang, Xuping
    2016 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, 2016, : 890 - 895
  • [13] Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators
    Zhang, Zhuo
    Zhang, Weize
    Wu, Qiyang
    Yu, Yueqing
    Liu, Xinyu
    Zhang, Xuping
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (01)
  • [14] A new symmetrical Z-shaped compliant linear actuator based on parasitic motion principle
    Xie, Yanlin
    Li, Yangmin
    Cheung, Benny Chifai
    SMART MATERIALS AND STRUCTURES, 2022, 31 (12)
  • [15] Conformal Mapping of a Z-Shaped Domain
    Skorokhodov, S. L.
    COMPUTATIONAL MATHEMATICS AND MATHEMATICAL PHYSICS, 2023, 63 (12) : 2451 - 2473
  • [16] Twisted, Z-shaped perylene bisimide
    Ilhan, F
    Tyson, DS
    Stasko, DJ
    Kirschbaum, K
    Meador, MA
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2006, 128 (03) : 702 - 703
  • [17] Conformal Mapping of a Z-Shaped Domain
    S. L. Skorokhodov
    Computational Mathematics and Mathematical Physics, 2023, 63 : 2451 - 2473
  • [18] Analysis of a subwavelength Z-shaped metamaterial
    Dhouibi, A.
    Burokur, S. N.
    de Lustrac, A.
    Priou, A.
    RADIO AND ANTENNA DAYS OF THE INDIAN OCEAN (RADIO 2012), 2013, 44
  • [19] Galloping instabilities of Z-shaped shading louvers
    Alonso, Gustavo
    Perez-Grande, Isabel
    Meseguer, Jose
    INDOOR AND BUILT ENVIRONMENT, 2017, 26 (09) : 1198 - 1213
  • [20] Freestanding loadbearing structures with Z-shaped particles
    Murphy, Kieran A.
    Reiser, Nikolaj
    Choksy, Darius
    Singer, Clare E.
    Jaeger, Heinrich M.
    GRANULAR MATTER, 2016, 18 (02)
12345