Mechanical and electrical properties of Al2O3 thin films on metals, ceramics and resins prepared by aerosol deposition method

被引：0
|
作者：
Tsujimichi, K [1 ]
Mori, K [1 ]
Yoshida, A [1 ]
Iwasawa, J [1 ]
Hatono, H [1 ]
Kiyohara, M [1 ]
Lebedev, M [1 ]
Akedo, J [1 ]
机构：
[1] TOTO Ltd, Chigasaki, Kanagawa 2538577, Japan
来源：
27TH INTERNATIONAL COCOA BEACH CONFERENCE ON ADVANCED CERAMICS AND COMPOSITES: B | 2003年 / 24卷 / 04期
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D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Large sized Al2O3 thin films with over 10 mum thickness were fabricated by aerosol deposition method (ADM) on various substrates without substrate heating. Vickers hardness and dielectric breakdown voltage of the films on metal substrates exceeded 1400 Hv and 150 V/mum, respectively. Flow velocity of the Al(2)O(3)particles was found to have an influence on the hardness of the films. It was also possible to fabricate Al2O3 films on soda-lime glass and resin substrates.
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页码：121 / 125
页数：5
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