Optical and electrical properties of Al2O3 films grown by aerosol deposition

被引:0
|
作者
机构
[1] Uemichi, Y.
[2] Takino, J.
[3] Nishikawa, K.
[4] Sato, Y.
[5] Yoshikado, S.
来源
Yoshikado, S. (syoshika@mail.doshisha.ac.jp) | 1600年 / Australasian Ceramic Society卷 / 48期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Optical and Electrical Properties of Al2O3 Films Grown by Aerosol Deposition
    Uemichi, Y.
    Takino, J.
    Nishikawa, K.
    Sato, Y.
    Yoshikado, S.
    JOURNAL OF THE AUSTRALIAN CERAMIC SOCIETY, 2012, 48 (01) : 64 - 68
  • [2] Dielectric Properties of Al2O3 Thick Films Grown by Aerosol Deposition Method
    Park, Jae Chang
    Yoon, Young Joon
    Kim, Hyo Tae
    Koo, Eun Hae
    Nam, Song-Min
    Kim, Jong-Hee
    Shim, Kwang Bo
    JOURNAL OF THE KOREAN CERAMIC SOCIETY, 2008, 45 (07) : 411 - 417
  • [3] Substrate hardness dependency on properties of Al2O3 thick films grown by aerosol deposition
    Lee, Dong-Won
    Kim, Hyung-Jun
    Kim, Yong-Nam
    Jeon, Min-Seok
    Nam, Song-Min
    SURFACE & COATINGS TECHNOLOGY, 2012, 209 : 160 - 168
  • [4] Optical properties of Al2O3 thin films grown by atomic layer deposition
    Kumar, Pradeep
    Wiedmann, Monika K.
    Winter, Charles H.
    Avrutsky, Ivan
    APPLIED OPTICS, 2009, 48 (28) : 5407 - 5412
  • [5] Substrate dependence on the optical properties of Al2O3 films grown by atomic layer deposition
    Kim, Y
    Lee, SM
    Park, CS
    Lee, SI
    Lee, MY
    APPLIED PHYSICS LETTERS, 1997, 71 (25) : 3604 - 3606
  • [6] Properties of Al2O3 thin films grown by atomic layer deposition
    Froehlich, K.
    Micusik, M.
    Dobrocka, E.
    Siffalovic, P.
    Gucmann, F.
    Fedor, J.
    NINTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2012, : 171 - 174
  • [7] Nonlinear optical properties of LiNbO3/Al2O3 films epitaxially grown by pulsed laser deposition
    LG Corp Inst of Technology, Seoul, Korea, Republic of
    Integr Ferroelectr, 1-4 (25-37):
  • [8] Mechanical and electrical properties of Al2O3 thin films on metals, ceramics and resins prepared by aerosol deposition method
    Tsujimichi, K
    Mori, K
    Yoshida, A
    Iwasawa, J
    Hatono, H
    Kiyohara, M
    Lebedev, M
    Akedo, J
    27TH INTERNATIONAL COCOA BEACH CONFERENCE ON ADVANCED CERAMICS AND COMPOSITES: B, 2003, 24 (04): : 121 - 125
  • [9] Optical and electrical properties of Al2O3 films containing silicon nanocrystals
    Yanagiya, S
    Ishida, M
    JOURNAL OF ELECTRONIC MATERIALS, 1999, 28 (05) : 496 - 502
  • [10] Optical and electrical properties of Al2O3 films containing silicon nanocrystals
    S. Yanagiya
    M. Ishida
    Journal of Electronic Materials, 1999, 28 : 496 - 502