Traceable coordinate metrology for microparts -: Basic principles and examples

被引：2
|
作者：
Haertig, Frank [1 ]
Neuschaefer-Rube, Ulrich [1 ]
机构：
[1] Phys Tech Bundesanstalt, Fachbereich 5 3, D-38116 Braunschweig, Germany
来源：
TM-TECHNISCHES MESSEN | 2008年 / 75卷 / 05期
关键词：
coordinate metrology; microparts; geometrical standards; numerical standards; computed tomography;
D O I：
10.1524/teme.2008.0874
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The article deals with traceable coordinate metrology for microparts. Microparts are 1D to 3D objects with structure sizes from a few mu m up to approx. 1 mm. Measurement devices, sensors, and test artefacts are described. Advices to future developments are given.
引用
收藏
页码：318 / 326
页数：9
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