共 50 条
- [1] SUB-MICRON IDT FABRICATION IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1978, 25 (04): : 232 - 232
- [2] The sub-micron fabrication technology SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 452 - 455
- [3] SUB-MICRON GRATING FABRICATION ON GAAS PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 269 : 49 - 54
- [4] MICRON AND SUB-MICRON LITHOGRAPHY FOR VLSI DEVICE FABRICATION SCANNING ELECTRON MICROSCOPY, 1981, : 343 - 350
- [5] FOCUSED ION-BEAM FABRICATION OF SUB-MICRON GOLD STRUCTURES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 609 - 617
- [8] Fabrication and characterization of magnetically hard CoPt ordered sub-micron structures JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2005, 7 (03): : 1605 - 1609
- [9] DRY ETCHING FOR SUB-MICRON STRUCTURES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 464 - 469