A one-chip scanning retina with an integrated micromechanical scanning actuator

被引：14

作者：

Hoshino, K ^{[1
]}

Mura, F ^{[1
]}

Shimoyama, I ^{[1
]}

机构：

[1] Univ Tokyo, Dept Mech Informat, Tokyo 1138656, Japan

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2001年 / 10卷 / 04期

基金：

日本学术振兴会;

关键词：

compound eye; microlens array; optical flow; photodiode; piezoelectric actuator; scanning retina;

D O I：

10.1109/84.967370

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microsensor that merges sensing and scanning functions on a single chip has been designed and fabricated, resulting in the first integrated scanning retina of its kind. A microfabrication technique has been developed to combine a one-dimensional array of photodiodes and electrostatically driven scanning slits on a single chip. The scanner actuates 12-mum-wide microslits by up to 20 mum on top of 30-mum-wide photodiodes, and the motion generates an effect similar to that of the retinal scanning vergence found in the insects' compound eyes. The silicon retina is coupled with an array of 120-mum-diameter microlenses to compose a microsized scanning compound eye, and the effect of retinal scanning in edge and position detection is demonstrated with the sensor. Each individual visual unit of the compound eye detects light contrast due to the scanning motion of the visual axis. The architecture of this scanning retina increases the resolution of a visual system with a relatively small number of receptors.

引用

页码：492 / 497

页数：6

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