New QCM sensor for real-time AMC detection in SMIF pods

被引：0
|
作者：
Takasu, Ryozo [1 ]
Akbar, Asneil [2 ]
Takigawa, Yukio [2 ]
Miyajima, Motoshu [2 ]
Kataoka, Yuji [1 ]
机构：
[1] Fujitsu Labs Ltd, 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430197, Japan
[2] Fujitsu Ltd, Atsugi, Kanagawa 2430197, Japan
来源：
ISSM 2006 CONFERENCE PROCEEDINGS- 13TH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have developed a new type of QCM sensor for real-time detection of chemical contaminant emission in SMIF pods. Because there is no need to modify SMIF pods when applying this sensor, introducing the QCM system to fabrication lines is very easy.
引用
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页码：421 / +
页数：2
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