Anomalous p-channel amorphous oxide transistors based on tin oxide and their complementary circuits

被引:48
|
作者
Ou, Chun-Wei [2 ]
Ho, Zhong Yo [3 ]
Chuang, You-Che [2 ]
Cheng, Shiau-Shin [2 ]
Wu, Meng-Chyi [2 ]
Ho, Kuo-Chuan [3 ]
Chu, Chih-Wei [1 ,4 ]
机构
[1] Acad Sinica, Res Ctr Appl Sci, Taipei 11529, Taiwan
[2] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 30013, Taiwan
[3] Natl Taiwan Univ, Dept Chem Engn, Taipei 10617, Taiwan
[4] Natl Chiao Tung Univ, Dept Photon, Hsinchu 30010, Taiwan
关键词
D O I
10.1063/1.2898217
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this article, we report the fabrication of SnO2 thin film transistors (TFTs) fabricated by reactive evaporation. Different from the previous reports, the fabricated TFTs exhibit p-type conductivity in its undoped form. The postdeposition annealing temperature was tuned to achieve p-channel SnO2 TFTs. The on/ off ratio and the field-effect mobility were similar to 10(3) and 0.011 cm(2)/V s, respectively. To demonstrate inverter circuit, two devices with different threshold voltages were combined and an output gain of 2.8 was achieved. The realization of p-channel oxide TFTs would open up new challenges in the area of transparent electronics. (C) 2008 American Institute of Physics.
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页数:3
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