A new procedure for measuring the decohesion energy for thin ductile films on substrates - Reply

被引:1
|
作者
Bagchi, A
Evans, AG
机构
关键词
D O I
10.1557/JMR.1996.0267
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Large scale yielding (LSY), in general, has a profound influence on the fracture toughness of metal/dielectric interfaces. For thin metal film/dielectric systems exhibiting ''weak'' bonding, small-scale yielding (SSY) prevails due to local plastic dissipation intrinsic to crack growth and the high yield strength of metal thin films. For systems involving low yield strength materials and strong interfaces, a more detailed LSY methodology needs to be developed.
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页码:2112 / 2113
页数:2
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